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1.    pdf_126 Best match in this PDF  |  All matches in this PDF 1 diffraction. This technique has been employed for nanolithography [2], ablation [3], material etching [4] and for local reduction of oxides [5]. Its main disadvantage is the low throughput that can be achieved in a fabrication process, even when bundles of fibers are used. Presently, we are investigating ... Related Searches: nitrogen purge | microlens array | excimer laser | fused silica

2.    pdf_126  (PAGE 4 OF 12) ... the spatial coherence of the 157 nm Excimer laser. Spatial Coherence Characterization using a Grating Shearing Interferometer H. Schreiber, Corning Tropel Corp., Fairport, New York

3.    pdf_126  (PAGE 6 OF 12) ... wants to thank Dr. K. Vogler, Dr. F. Voß and Dr. T. Nagy from Lambda Physik for enabling and supporting the measurements. H. Schreiber Corning Tropel Corp., 60 O'Connor Road, Fairport, NY 14450, schreibeh@corning.com References [1] Max Born & Emil Wolf, Principles of Optics, Chapter X: Partially ...

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