33 UVOpticalSystems VarioLas100 UV Optical Systems 1. Description The VarioLasTM optical system, based on an excimer laser and a beam delivery system, is a highly flexible tool for the research and development of micromachining applications. High-precision optics are the key components of the VarioLas ...
... , which required the use of expensive, thermally resistant glass. In addition, the thermal cycling could still cause cracking and yields of less than 100%. Today, virtually all flat-panel silicon annealing is carried out using excimer lasers in combination with low-temperature ovens (200°C), allowing ... Related Searches:beam shaper | beam homogenizer | beam profiler | top hat
... the Center for Devices and Radiological Health on all systems ordered for shipment after August 2, 1976. Coherent offers a limited warranty for all VarioLas systems. For full details of this warranty coverage, please refer to the Service section at www.Coherent.com or contact your local Sales or Service ...
33 UVOpticalSystems VarioLas100 UV Optical Systems 1. Description The VarioLasTM optical system, based on an excimer laser and a beam delivery system, is a highly flexible tool for the research and development of micromachining applications. High-precision optics are the key components of the VarioLas ...