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1.    2002_AnalChem_VUV-lamp-TOFMS_2 Best match in this PDF  |  All matches in this PDF Single Photon Ionization (SPI) via Incoherent VUV-Excimer Light: Robust and Compact Time-of-Flight Mass Spectrometer for On-Line, Real-Time Process Gas Analysis F. Mu1hlberger, J. Wieser, A. Ulrich,§ and R. Zimmermann,,|* GSF-Forschungszentrum GmbH, Institut fu¨r O¨ kologische Chemie, D-85764 Oberschleissheim ... Related Searches: excimer lamp | second harmonic generator | excimer

2.    pdf_126 Best match in this PDF  |  All matches in this PDF 1 diffraction. This technique has been employed for nanolithography [2], ablation [3], material etching [4] and for local reduction of oxides [5]. Its main disadvantage is the low throughput that can be achieved in a fabrication process, even when bundles of fibers are used. Presently, we are investigating ...

3.    Intrinsic_Birefringence_2 Best match in this PDF  |  All matches in this PDF ... made of glassy materials, in part because of their inherent isotropic optical properties. However, their use in the deep and vacuum ultraviolet VUV is limited by their high absorption at these wavelengths. For precision optics in the VUV, cubic crystalline materials with shorter-wavelength transmission ... Related Searches: polarizer

4.  UV Optical Systems, Modules and Components ... Precision Optics Related Accessories Download Free! Excimer Lasers Product Catalog 2009Coherent develops, designs, and manufactures UV and VUV optical systems, modules, and components for Scientific, Medical, and Industrial applications. Our MicroLas® product line provides services for feasibility ... Related Searches: beam homogenizer | homogenizer | microlas

5.    ExcimersPushMachingLimitsforResolutionRev2 Best match in this PDF  |  All matches in this PDF ... F2-laser beam Homogenizer lens 9 × 9 cyl. lenses 22 × 22-mm field Homogenizer Enclosure: inert gas flow Dielectric attenuator Prism expander VUV fluorescent window Field lens Mask field 5 × 5 mm 25 X Schwarzschild Sample alignment system Nozzle Sample Excimers find their niche As diode lasers continue ... Related Searches: homogenizer | 193 nm laser | excimer lamp

6.    interview Best match in this PDF  |  All matches in this PDF INTERVIEW www.laser-journal.de LTJ 7© 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim Effectively delivering the next generation of UV laser solutions Interview with Tobias Damm, Managing Director of Coherent Lambda Physik GmbH Coherent has acquired and integrated several important companies in ... Related Searches: lambda physik | tuilaser

7.    pdf_129 Best match in this PDF  |  All matches in this PDF ... cross-sections) have precluded their use except in a few recent cases of inelastic scattering. Recently, groups at Cornell and Berkeley have used VUV radiation to perform one-photon photoionization detection of polyatomic radical fragments from bimolecular reactions. The Berkeley group as mentioned ... Related Searches: lpx | 193 nm laser | lambda physik

8.    pdf_127 Best match in this PDF  |  All matches in this PDF ... physical interactions within excited electronic states are investigated in trivalent rareearth ion doped, wide-band-gap dielectric crystals by VUV absorption and VUV laser induced fluorescence. Photodissociation dynamic processes for potential 157 nm resist materials are investigated by mass spectroscopy ... Related Searches: compex 205 | 1064 nm laser | compex 110 | 193 nm laser

9.    pdf_130  (PAGE 1 OF 8) ... via a gas-tight tube into the p rocessing chamber, both evacuated to 10- 5 To rr and subsequently flushed with several To rr of Ar gas to allow for VUV transpare n c y. A sliding apert u re within the tube selected a u n i f o rm portion of the beam. The target was movable on a X-Y translation stage ...

10.    pdf_130  (PAGE 2 OF 8) ... smooth, 6m deep recess with sharp walls (etch area: 200 micron x 200 micron - left and 200 micron x 100 micron - right). Fig. 1: Setup of the VUV laser processing system at the University of Toronto.

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