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1.  Coherent Inc. Lasers Drive Wafer and Reticle Inspection Wafer and Reticle Inspection DPSS, ion and optically pumped semiconductor lasers enable front-end semiconductor manufacturing. Find the Laser Solution that Fits your Application Needs. Search Applications Notes Search by material and/or process. -- SELECT MATERIAL -- Ceramic Composite Diamond Fabric… Related Searches: paladin

2.    SemiManufMagRev2 Best match in this PDF  |  All matches in this PDF …virtually maintenance free. WAFER INSPECTION Wafer inspection is also performed by scanning one or more focused laser spots over the test surface. However, wafers are highly reflective, so only reflected or scattered light can be captured. In addition, when examining patterned wafers, light is scattered by… Related Searches: 257 nm laser | spatial light modulator | argon | femtosecond laser system

3.    UV Lasers LTJJan2011 Best match in this PDF  |  All matches in this PDF …of surface being examined (pattern or unpatterned wafer), and the type of defect being sought (pattern defects, contaminants, voids, etc.). Broadly, laser wafer inspection schemes can be classed as either "brightfield" or "darkfield," where the wafer appears bright with defects showing as dark areas… Related Searches: llo | uv diode laser | laser lift-off | sapphire wafer

4.    microelectrdetectionRev2 Best match in this PDF  |  All matches in this PDF …technology for inspecting unpatterned wafers often lags a generation behind the technology used for lithography. This means that the inspection wavelength need not be identical to the size of killer defects, particularly if those defects manifest either as foreign material on the wafer or as a raised… Related Searches: argon ion laser | 244nm | diode-pumped solid-state | argon laser

5.    productronic Coherent approved Best match in this PDF  |  All matches in this PDF …toward the future. Wafer Singulation The combination of small physical size and high functionality required for smart phones creates a need for thinner memory wafers (for advanced packaging), as well as wafers incorporating low- dielectrics to improve power consumption. Both these wafer types present significant… Related Searches: ito patterning | avia 355 | polysilicon annealing | 355-20

6.    GlobalSemiArt2Rev2 Best match in this PDF  |  All matches in this PDF …solid-state laser alternative. Wafer inspection The traditional laser source for wafer inspection has been the air-cooled argon laser at 488nm. Smaller defect detection requires increasing laser power and/or decreasing laser wavelength. Cutting-edge wafer inspection systems have already made the transition… Related Searches: 244nm | diode-pumped solid-state | 257 nm laser | 355 nm

7.  Coherent Inc. Semiconductor Manufacturing with Excimer Lasers …fields of application for compact excimer lasers are inspection and testing of masks and wafers. Compact excimer lasers are also an important tool in the manufacturing of masks. Large frame excimer lasers are used as illumination source for the wafer stepper systems. In 1992 the full field projection exposure…

8.  Coherent Inc. Paladin UV Lasers for Microelectronics Applications …Applications . -- Select a Related Application -- c-Si Dielectric Ablation c-Si Selective Emitter Formation Laser Direct Imaging Solar Wafer and Reticle Inspection Paladin’s superior design and manufacturing technology result in a unique combination of high optical performance, exceptional reliability… Related Searches: paladin | uv 355 | paladin laser | price sapphire

9.  Coherent #7.qxd  (PAGE 2 OF 4) …inspecting unpatterned wafers often lags a generation behind the technology used for lithography. This means that the inspection wavelength need not be identical to the size of killer defects, particularly if those defects manifest either as foreign material on the wafer or…

10.    nphoton.2006.95 Best match in this PDF  |  All matches in this PDF …of diode-pumped, solid-state (DPSS) lasers emitting UV wavelengths has grown in the past couple of years, both for industrial uses, such as wafer inspection and scribing, and for scientific applications, such as flow cytometry. In many cases they've replaced older technologies, such as gas lasers,… Related Searches: 266nm cw laser | third harmonic generation | diode-pumped solid-state | 266 cw

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Search Suggestions: 257 nm laser | spatial light modulator | argon | femtosecond laser system | argon ion laser | argon krypton laser | indigo | 355 nm diode | sapphire wafer | llo

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